[Elsevier] Mirror-grinding of single-crystal diamond substrates with a rotary grinder

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journal:Diamond and Related Materials

Authors:Hideo Aida; Ryuji Oshima; Hiroki Minamigata; Shogo Kawaguchi; Junpei Tokutake; Juan Manuel Del Angel Sifuentes; Yutaka Kimura

Published date:2022-1-

DOI:10.1016/j.diamond.2021.108733

PDF link:https://www.sciencedirect.com/sc ... 925963521004969/pdf

Article link:https://doi.org/10.1016/j.diamond.2021.108733

Article Source:Elsevier BV


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