[Elsevier] Surface micromachining multilayer porous silicon for spectral filtering applications

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journal:Materials Science in Semiconductor Processing

Authors:Yaman Afandi; Giacinta Parish; Adrian Keating

Published date:2022-2-

DOI:10.1016/j.mssp.2021.106314

PDF link:https://www.sciencedirect.com/sc ... 36980012100648X/pdf

Article link:https://doi.org/10.1016/j.mssp.2021.106314

Article Source:Elsevier BV


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