[Elsevier] Enhanced polarization in Hf1-xZrxO2 films through rapid thermal annealing followed by rapid cooling

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journal:Thin Solid Films

Authors:Kyungsoo Hwang; An Hoang-Thuy Nguyen; Manh-Cuong Nguyen; Geon Park; Hyunsoo Kim; Jae Kyeong Kim; Rino Choi

Published date:2026-9-

DOI:10.1016/j.tsf.2026.141022

PDF link:https://www.sciencedirect.com/sc ... 040609026001690/pdf

Article link:https://doi.org/10.1016/j.tsf.2026.141022



Article Source:Elsevier BV。



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