[Elsevier] Modulation of ferroelectric properties in TiN/Hf0.5Zr0.5O2/TiN capacitors through oxygen plasma treatment of the TiN bottom electrode

jakir_ete_ruet Post time 3 day(s) ago | Show all posts |Read mode
This post will be closed automatically in 2026-09-16 16:06
Reward100points

journal:Surfaces and Interfaces

Authors:Tung-Ming Pan; Wei-Che Weng; Jhong-Hao Wu; Fu-Chien Chiu; Jim-Long Her

Published date:2025-9-

DOI:10.1016/j.surfin.2025.107520

PDF link:https://www.sciencedirect.com/sc ... 468023025017729/pdf

Article link:https://doi.org/10.1016/j.surfin.2025.107520



Article Source:Elsevier BV。



Remark:
User 'pbunny', don't upload anything.

Best Answer

Please approve

View Full Content

Reply

Use magic Donate Report

All Reply1 Show all posts
Mohamed_Amin Post time 3 day(s) ago | Show all posts

This post has been completed

Completed attachments will be deleted within 24 hours.
Reply

Use magic Donate Report

Return to the list