[Other] Unified Simulation of Silicon Oxidation Based on the Interfacial Silicon Emission Model

Dartia88 Post time Yesterday 06:01 | Show all posts |Read mode
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journal:Japanese Journal of Applied Physics

Authors:Masashi Uematsu; Hiroyuki Kageshima; Kenji Shiraishi

Published date:2000-7-1

DOI:10.1143/jjap.39.l699

PDF link:https://iopscience.iop.org/article/10.1143/JJAP.39.L699

Article link:https://doi.org/10.1143/jjap.39.l699

Article Source:IOP Publishing


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Sweetums33 Post time Yesterday 06:03 | Show all posts
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