[Other] Roles of excess minority carrier recombination and chemisorbed O2 species at SiO2/Si interfaces in Si dry oxidation: Comparison between p-Si(001) and n-Si(001) surfaces

Dartia88 Post time Half hour(s) ago | Show all posts |Read mode
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journal:The Journal of Chemical Physics

Authors:Yasutaka Tsuda; Akitaka Yoshigoe; Shuichi Ogawa; Tetsuya Sakamoto; Yoshiki Yamamoto; Yukio Yamamoto; Yuji Takakuwa

Published date:2022-12-21

DOI:10.1063/5.0109558

PDF link:https://pubs.aip.org/aip/jcp/art ... 234705_1_online.pdf

Article link:https://doi.org/10.1063/5.0109558

Article Source:AIP Publishing


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Mariia17 Post time 16 min. ago | Show all posts

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