[Elsevier] Knowledge augmented broad learning system for computer vision based mixed-type defect detection in semiconductor manufacturing

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journal:Robotics and Computer-Integrated Manufacturing

Authors:Junliang Wang; Pengjie Gao; Jie Zhang; Chao Lu; Bo Shen

Published date:2023-6-

DOI:10.1016/j.rcim.2022.102513

PDF link:https://www.sciencedirect.com/sc ... 736584522001958/pdf

Article link:https://doi.org/10.1016/j.rcim.2022.102513

Article Source:Elsevier BV


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