[Other] Atomic layer deposition of ZnO thin films using a liquid cyclopentadienyl-based precursor

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journal:Journal of Vacuum Science & Technology A

Authors:Fumikazu Mizutani; Makoto Mizui; Nobutaka Takahashi; Mari Inoue; Toshihide Nabatame

Published date:2024-3-1

DOI:10.1116/6.0003178

PDF link:https://pubs.aip.org/avs/jva/art ... 403_1_6.0003178.pdf

Article link:https://doi.org/10.1116/6.0003178

Article Source:American Vacuum Society


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