[Other] Impedance match timing for pulsed RF control: Global model and validation experiments

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Edited by AlphaChalieIX at 2026-9-17 11:15

journal:Journal of Vacuum Science & Technology A

Authors:C. Smith; J. Brandon; S. Nam; K. Bae; J. Lee; S. Shannon

Published date:2026-7-1

DOI:10.1116/6.0005083

PDF link:https://pubs.aip.org/avs/jva/art ... 001_1_6.0005083.pdf

Article link:https://doi.org/10.1116/6.0005083

Article Source:American Vacuum Society


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