[Other] Water vapor plasma-assisted low-temperature bonding of cyclo-olefin polymer for microchannel with integrated leak detector

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journal:MRS Advances

Authors:Masaaki Tsukamoto; Hirokazu Terai; Madoka Tsumaya; Shigeru Kurosawa; Osamu Tsuji; Masashi Sato; Yoshiyuki Inoue; Keiko Kawano; Tomoaki Matsushima; Toshiyuki Tsuchiya

Published date:--

DOI:10.1557/s43580-022-00346-8

PDF link:https://link.springer.com/conten ... 580-022-00346-8.pdf

Article link:https://doi.org/10.1557/s43580-022-00346-8

Article Source:Springer Science and Business Media LLC


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