[Elsevier] Spatial distribution of gas flux in molecular flow regime of linear differential pumping systems

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journal:Vacuum

Authors:Ziyang He; Haitao Fan; Hailin Bi; Minggao Xu; Xudi Wang; Jiuzhong Yang

Published date:2025-12-

DOI:10.1016/j.vacuum.2025.114740

PDF link:https://www.sciencedirect.com/sc ... 042207X25007304/pdf

Article link:https://doi.org/10.1016/j.vacuum.2025.114740

Article Source:Elsevier BV


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