[Other] Pulsed chemical vapor deposition of cobalt and cobalt carbide thin films

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journal:Journal of Vacuum Science & Technology A

Authors:Sen Chen; Xiangyu Zhang; Bowen Liu; Zhongwei Liu

Published date:2022-3-1

DOI:10.1116/6.0001578

PDF link:https://pubs.aip.org/avs/jva/art ... 023401_1_online.pdf

Article link:https://doi.org/10.1116/6.0001578

Article Source:American Vacuum Society


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