[Other] AlGe wafer bonding in ultra-high vacuum environment

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journal:Journal of Vacuum Science & Technology B

Authors:Thomas Stttinger; Bernhard Rebhan; Kurt Hingerl

Published date:2023-7-1

DOI:10.1116/6.0002539

PDF link:https://pubs.aip.org/avs/jvb/art ... 802_1_6.0002539.pdf

Article link:https://doi.org/10.1116/6.0002539

Article Source:American Vacuum Society


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