[Other] Wafer Temperature Control Using Helium Pressure and Observer-Based Model Predictive Control

luuvinhphu Post time Yesterday 23:22 | Show all posts |Read mode
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journalㄩASME Letters in Dynamic Systems and Control

AuthorsㄩDaisuke Hayashi; Kotaro Takijiri; Takayuki Ueda

Published dateㄩ2023-7-1

DOIㄩ10.1115/1.4063600

PDF linkㄩhttps://asmedigitalcollection.as ... ldsc_3_3_031001.pdf

Article linkㄩhttps://doi.org/10.1115/1.4063600

Article SourceㄩASME International﹝


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