[Other] Optimization of molecular beam epitaxial film thickness uniformity using Monte Carlo simulations and an artificial neural network

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journalㄩReview of Scientific Instruments

AuthorsㄩKang Liang; Zhao Zhang; Gai Wu; Zhiyin Gan; Sheng Liu

Published dateㄩ2022-6-1

DOIㄩ10.1063/5.0076168

PDF linkㄩhttps://pubs.aip.org/aip/rsi/art ... 063904_1_online.pdf

Article linkㄩhttps://doi.org/10.1063/5.0076168

Article SourceㄩAIP Publishing﹝


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