[Other] Solid State Technology Volume 52, Issue 12 December 2009 Pages 10-13

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Request: An analysis of potential 450mm CMP tool scaling questions (Solid State Technology, 2009)


Looking for the following article:



Title:
An analysis of potential 450mm CMP tool scaling questions



Authors:
Leonard Borucki
Ara Philipossian
Michael Goldstein



Journal:
Solid State Technology



Volume:
52



Issue:
12



Publication Date:
December 2009



Pages:
10-13



I am particularly interested in the CMP thermal modeling and 450 mm scaling discussion.

Any PDF or scanned copy would be greatly appreciated.
Thank you.

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