[Other] Plasma and beam modeling of low-temperature plasma ion sources

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journalㄩMRS Advances

AuthorsㄩSeth Veitzer; Morgan Dehnel; Daniel Main; St谷phane Melanson

Published dateㄩ2025-4-

DOIㄩ10.1557/s43580-025-01230-x

PDF linkㄩhttps://link.springer.com/conten ... 580-025-01230-x.pdf

Article linkㄩhttps://doi.org/10.1557/s43580-025-01230-x

Article SourceㄩSpringer Science and Business Media LLC﹝


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