[Other] WS2 p-MOSFETs with channels deposited by plasma-enhanced atomic-layer deposition

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journalㄩApplied Physics Letters

AuthorsㄩRuixue Li; Rebecca A. Dawley; Shivanshu Mishra; Anil Adhikari; Ageeth A. Bol; Steven J. Koester

Published dateㄩ2025-6-23

DOIㄩ10.1063/5.0267728

PDF linkㄩhttps://pubs.aip.org/aip/apl/art ... 102_1_5.0267728.pdf

Article linkㄩhttps://doi.org/10.1063/5.0267728

Article SourceㄩAIP Publishing﹝


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