[Other] First-principles investigation of chlorine adsorption onto GaN(0001) during atomic layer etching

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journalㄩJournal of Vacuum Science & Technology A

AuthorsㄩT. Rasoanarivo; C. Mannequin; A. Rhallabi; F. Roqueta; M. Boufnichel; I. Braems

Published dateㄩ2026-9-1

DOIㄩ10.1116/6.0005564

PDF linkㄩhttps://pubs.aip.org/avs/jva/art ... 601_1_6.0005564.pdf

Article linkㄩhttps://doi.org/10.1116/6.0005564

Article SourceㄩAmerican Vacuum Society﹝


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