[Other] Cryogenic etching of positively tapered silicon pillars with controllable profiles

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journalㄩJournal of Vacuum Science & Technology B

AuthorsㄩXiaoli Zhu; Aixi Pan; Babak Shokouhi; Bo Cui

Published dateㄩ2024-5-1

DOIㄩ10.1116/6.0003372

PDF linkㄩhttps://pubs.aip.org/avs/jvb/art ... 206_1_6.0003372.pdf

Article linkㄩhttps://doi.org/10.1116/6.0003372

Article SourceㄩAmerican Vacuum Society﹝


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