[Elsevier] Mechanisms underlying temperature uniformity in electrostatic chucks through experimental and simulation methods

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journal：Applied Thermal Engineering

Authors：Chanjuan Liu; Jiuru Gao; Zhiwei He; Kang Han; Zhen Yang; Kaidong Xu; Shiwei Zhuang

Published date：2024-2-

DOI：10.1016/j.applthermaleng.2023.122011

PDF link：https://www.sciencedirect.com/sc ... 359431123020409/pdf

Article link：https://doi.org/10.1016/j.applthermaleng.2023.122011

Article Source：Elsevier BV。

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[Elsevier] Mechanisms underlying temperature uniformity in electrostatic chucks through experimental and simulation methods Copy