[IOP] Growth and characterization of 汕-Ga2O3thin films grown on off-angled Al2O3substrates by metal-organic chemical vapor deposition

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journalㄩJournal of Semiconductors

AuthorsㄩYabao Zhang; Jun Zheng; Peipei Ma; Xueyi Zheng; Zhi Liu; Yuhua Zuo; Chuanbo Li; Buwen Cheng

Published dateㄩ2022-9-1

DOIㄩ10.1088/1674-4926/43/9/092801

PDF linkㄩhttps://iopscience.iop.org/article/10.1088/1674-4926/43/9/092801

Article linkㄩhttps://doi.org/10.1088/1674-4926/43/9/092801

Article SourceㄩIOP Publishing﹝


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