[Other] Surface treatment of TaN for sub-2nm, smooth, and conducting atomic layer deposition Ru films

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journal：Journal of Vacuum Science & Technology A

Authors：Corbin Feit; Udit Kumar; Md. Rafiqul Islam; Luis Tomar; S. Novia Berriel; John T. Gaskins; Patrick E. Hopkins; Sudipta Seal; Parag Banerjee

Published date：2024-5-1

DOI：10.1116/6.0003440

PDF link：https://pubs.aip.org/avs/jva/art ... 407_1_6.0003440.pdf

Article link：https://doi.org/10.1116/6.0003440

Article Source：American Vacuum Society。

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[Other] Surface treatment of TaN for sub-2nm, smooth, and conducting atomic layer deposition Ru films