[Other] Analyses and Formation Mechanism of Indium Tin Oxide Target Nodules

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journalㄩTransactions of the Materials Research Society of Japan

AuthorsㄩSeiichiro Takahashi; Ryuichi Komatsu

Published dateㄩ2010--

DOIㄩ10.14723/tmrsj.35.639

PDF linkㄩhttps://www.jstage.jst.go.jp/article/tmrsj/35/3/35_639/_pdf

Article linkㄩhttps://doi.org/10.14723/tmrsj.35.639

Article SourceㄩThe Materials Research Society of Japan﹝


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