[OSA] Laser-welded high-stability all-silicon dual-cavity MEMS Fabry每Perot pressure sensor with self-temperature compensation

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journalㄩOptics Letters

AuthorsㄩPenghui Dai; Haojun Lin; Quan Guo; Hongyu Liu; Xuesong Xiang; Xueyi Wu; Junfeng Jiang; Tiegen Liu; Shuang Wang

Published dateㄩ2026-8-1

DOIㄩ10.1364/ol.601490

PDF linkㄩhttps://opg.optica.org/viewmedia.cfm?URI=ol-51-15-4196&seq=0

Article linkㄩhttps://doi.org/10.1364/ol.601490

Article SourceㄩOptica Publishing Group﹝


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