[Wiley] Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching

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journalㄩSmall Methods

AuthorsㄩJeongbin Lee; Jung固ae Kim; Jieun Oh; Dongjun Lee; Seo咆yun Lee; Hyekyung Kim; Jiwoo Oh; Younseon Wang; Woo咆ee Kim

Published dateㄩ2025-8-

DOIㄩ10.1002/smtd.202402166

PDF linkㄩhttps://onlinelibrary.wiley.com/ ... 1002/smtd.202402166

Article linkㄩhttps://doi.org/10.1002/smtd.202402166

Article SourceㄩWiley﹝


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