[Other] Etching and fluorination of yttrium oxide (Y2O3) irradiated with fluorine ions or radicals

widdlehammer Post time 1 hour(s) ago | Show all posts |Read mode
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journalㄩJournal of Vacuum Science & Technology A

AuthorsㄩHojun Kang; Tomoko Ito; Junghwan Um; Hikaru Kokura; Sungil Cho; Hyunjung Park; Kazuhiro Karahashi; Satoshi Hamaguchi

Published dateㄩ2025-1-1

DOIㄩ10.1116/6.0004137

PDF linkㄩhttps://pubs.aip.org/avs/jva/art ... 003_1_6.0004137.pdf

Article linkㄩhttps://doi.org/10.1116/6.0004137

Article SourceㄩAmerican Vacuum Society﹝


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