[Elsevier] Molecular dynamics investigation of ultrasonic vibration-assisted polishing process for the alternating surface of Graphene/GaN layered composite

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journalㄩMaterials Science in Semiconductor Processing

AuthorsㄩQiwei Sun; Zhan Zhang; Bei Wang; Wenjing Xu; Tinghong Gao; Qingquan Xiao; Jin Huang; Yunjun Ruan; Wensheng Yang

Published dateㄩ2027-2-

DOIㄩ10.1016/j.mssp.2026.111307

PDF linkㄩhttps://www.sciencedirect.com/sc ... 369800126009030/pdf

Article linkㄩhttps://doi.org/10.1016/j.mssp.2026.111307

Article SourceㄩElsevier BV﹝


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