[Other] A DBR and ANFIS integrated dynamic scheduling algorithm for semiconductor wafer fabrication

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journal: Tien Tzu Hsueh Pao/Acta Electronica Sinica

Authors: Cao, Z.C., Peng, Y.Z., Li, B. and Liu, M.

Published dateㄩ2015

DOIㄩ10.3969/j.issn.0372-2112.2015.10.030

Article linkㄩA DBR and ANFIS integrated dynamic scheduling algorithm for semiconductor wafer fabrication - Harbin Institute of Technology








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