[SPIE] On-chip laser beam scanner based on SiN PIC integrated with PZT MEMS cantilever for AR

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journal：Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) VII

Authors：Oguzhan Avci; Min Chul Shin; Youmin Wang; Steven Hickman; Ozan Yilmaz

Published date：2026-3-6

DOI：10.1117/12.3089974

Article link：https://doi.org/10.1117/12.3089974

Article Source：SPIE。

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[SPIE] On-chip laser beam scanner based on SiN PIC integrated with PZT MEMS cantilever for AR