[Elsevier] Paving the way toward the world's first 200mm SiC pilot line

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journalㄩMaterials Science in Semiconductor Processing

AuthorsㄩMattia Musolino; Xueping Xu; Hui Wang; Varathajan Rengarajan; Ilya Zwieback; Gary Ruland; Danilo Crippa; Marco Mauceri; Michele Calabretta; Angelo Messina

Published dateㄩ2021-11-

DOIㄩ10.1016/j.mssp.2021.106088

PDF linkㄩhttps://www.sciencedirect.com/sc ... 369800121004327/pdf

Article linkㄩhttps://doi.org/10.1016/j.mssp.2021.106088

Article SourceㄩElsevier BV﹝


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