[SPIE] Fast curvilinear optical proximity correction adopting quasi-uniform B-spline curves

matcherc Post time 4 day(s) ago | Show all posts |Read mode
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journalㄩEighth International Workshop on Advanced Patterning Solutions (IWAPS 2024)

AuthorsㄩHe Yang; Zhen Li; Miao Yuan; Zhaoxuan Li; YanQiu Li

Published dateㄩ2024-12-10

DOIㄩ10.1117/12.3052949

Article linkㄩhttps://doi.org/10.1117/12.3052949

Article SourceㄩSPIE


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