[Other] Density functional theory calculations for investigation of atomic structures of 4H-SiC/SiO2 interface after NO annealing

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journalㄩJournal of Applied Physics

AuthorsㄩNaoki Komatsu; Mizuho Ohmoto; Mitsuharu Uemoto; Tomoya Ono

Published dateㄩ2022-10-21

DOIㄩ10.1063/5.0102472

PDF linkㄩhttps://pubs.aip.org/aip/jap/art ... 155701_1_online.pdf

Article linkㄩhttps://doi.org/10.1063/5.0102472

Article SourceㄩAIP Publishing


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