[Elsevier] Understanding of Si3N4-H3PO4 reaction chemistry for the control of Si3N4 dissolution kinetics

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journalㄩJournal of Industrial and Engineering Chemistry

AuthorsㄩTaegun Park; Changjin Son; Taehyeon Kim; Sangwoo Lim

Published dateㄩ2021-10-

DOIㄩ10.1016/j.jiec.2021.07.001

PDF linkㄩhttps://www.sciencedirect.com/sc ... 226086X21003786/pdf

Article linkㄩhttps://doi.org/10.1016/j.jiec.2021.07.001

Article SourceㄩElsevier BV


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