[RSC] Atomic-level surface formation of large-size SiC substrates by chemical mechanical polishing: interfacial chemistry and removal mechanism

Amarendra@123 Post time Yesterday 23:47 | Show all posts |Read mode
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journalㄩJournal of Materials Chemistry C

AuthorsㄩXin Song; Yiran Zou; Jiani Guo; Zhigang Dong; Renke Kang; Shang Gao

Published dateㄩ--

DOIㄩ10.1039/d6tc01597b

PDF linkㄩhttp://pubs.rsc.org/TC/article-p ... 7B/0/D6TC01597B.pdf

Article linkㄩhttps://doi.org/10.1039/d6tc01597b

Article SourceㄩRoyal Society of Chemistry (RSC)


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