[Other] Development of a Latching Valve for Micro-Chem-Lab

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journalㄩMicro-Electro-Mechanical Systems (MEMS)

AuthorsㄩC. Channy Wong; Douglas R. Adkins; Ronald P. Manginell; Gregory C. Frye-Mason; Peter J. Hesketh; Thomas Stanczyk

Published dateㄩ1999-11-14

DOIㄩ10.1115/imece1999-0301

PDF linkㄩhttps://asmedigitalcollection.as ... _imece1999-0301.pdf

Article linkㄩhttps://doi.org/10.1115/imece1999-0301

Article SourceㄩAmerican Society of Mechanical Engineers﹝


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