[Elsevier] Self每Activating atomic layer deposition: A kinetic strategy for growth of metastable, high work function MoO2 thin films

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journalㄩApplied Surface Science

AuthorsㄩHyun-June Park; Kyu-Hwan Seok; Muheon Kim; Subin Lee; Min-Su Cho; Seungmin Jo; Woongkyu Lee; Yong Joo Park; Dong Hun Shin; Sung-Woong Chung

Published dateㄩ2026-9-

DOIㄩ10.1016/j.apsusc.2026.167082

PDF linkㄩhttps://www.sciencedirect.com/sc ... 169433226012869/pdf

Article linkㄩhttps://doi.org/10.1016/j.apsusc.2026.167082

Article SourceㄩElsevier BV﹝


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metastock Post time Yesterday 16:09 | Show all posts

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